Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate
Optical waveguides are important for guiding lightwave from a place to other places. Propagation and insertion losses of the optical waveguides should be considered to be in low values. Recently, optical waveguides with circular structures, which are optical fibers, are used widely for guiding lightwave in long-distance optical communication with very low propagation and insertion losses. Simultaneously, optical waveguides with planar structure are also developed for short distance communication in optical devices. We have reported design and analysis of the planar optical waveguides. In this paper, fabrication of planar optical waveguides using a polyimide material on thin silicon dioxide combined with the silicon substrate is reported. The polyimide material is used for the core of the optical waveguides. The silicon dioxide located on the silicon substrate and the air is used for cladding of the optical waveguides. Fabrication of the optical waveguides such as oxidation, photoresist coating, masking, ultra-violet exposure, and etching was done. The fabricated optical waveguides were characterized physically using a standard microscope and scanning electron microscope (SEM). The fabrication processes and characterization results are reported and discussed in detail.
M. Cvijetic, I. B. Djordjevic, Advanced Optical Communication Systems and Networks, Norwood, USA: Artech House, 2013.
S. Iezekiel, Microwave Photonic: Device and Applications, Chichester, UK: John Wiley & Sons, Ltd., 2009.
Y. N. Wijayanto, A. Kanno, H. Murata, T. Kawanishi, and Y. Okamura, "Millimeter-wave radar receiver using Z-cut LiNbO3 optical modulator with orthogonal-gap-embedded patch-antennas on low-k dielectric material," IEICE Trans. on Electron., vol. E98-C, no. 8, pp. 783-792, August 2015. Crossref
B. Mulyanti, P. M. Menon, S. Shaari, T. Hariyadi, L. Hasanah, H. Hroon, A. A. Ehsan, D. Mahmudin, G. Wiranto, B. Y. Majlis, "Design and optimization of coupled microring resonators in silicon-on-insulator," Sains Malay., vol. 43, no 2, pp. 247–252, 2014.
(2012) Integrated silicon optical transmitter to carry large volumes of data between CPUs. [Online]. Available: https://phys.org/news/2012-08-silicon-optical-transmitter-large-volumes.html
M. F. M. Salleh, Z. Zakaria, "Optical fiber bending detection on long distance OPGW using OTDR," Telkomnika, vol. 13, no. 13, 2015. Crossref
K. Okamoto, Fundamental of Optical Waveguides, San Diego, USA: Academic Press (Elsevier), 2006.
W. H. Huang and W. S. Wang, "Gallium in-diffusion for the fabrication of lithium niobate optical waveguides," in IEEE Photon. Technol. Lett., vol. 19, no. 20, pp. 1679-1681, Oct. 2007. Crossref
S. Y. Gang, A. B. Mohammad, N. M. Kassim and M. H. Ibrahim, "Fabrication of polymeric optical waveguides," in Proc. 2004 RF and Microwave Conference (IEEE Cat. No.04EX924), 2004, pp. 265-268. Crossref
Y. N. Wijayanto, D. Mahmudin, and P. Daud, "Design of rectangular optical waveguide on LiTaO3 crystal using thermal annealed proton exchange methods," Jurnal Elektronika dan Telekomunikasi, vol. 14, no. 1, pp. 20-23, Juni 2014. Crossref
D. Mahmudin and Y. N. Wijayanto, "Optical waveguide using polymer material on silicon dioxide substrate for 1,55 μm optical wavelength," Jurnal Elektronika dan Telekomunikasi, vol. 14, no. 2, pp.56-60, Des. 2014. Crossref
P. W. Juodawlkis, J. J. Plant, F. J. O'Donnell and J. B. Schlager, "Slab-coupled optical waveguide devices for low-noise signal generation," in Proc. 2007 Digest of the IEEE/LEOS Summer Topical Meetings, Portland, OR, 2007, pp. 167-168. Crossref
X. Xu, L. Ma, W. Zhang, J. Du and Z. He, "Fabrication and performance analysis of polymer waveguides for optical interconnects," in Proc. 2016 IEEE Optical Interconnects Conference (OI), San Diego, CA, 2016, pp. 76-77. Crossref
A. Kanno, T. Umezawa, T. Kuri, N. Yamamoto, T. Kawanishi, Y. N. Wijayanto, "Key technologies for millimeter-wave distributed radar system over a radio over fiber network," in Proc. 2016 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications, Tangerang, Indonesia, 2016. Crossref
M. Galili, F. Da Ros, H. Hu, M. Pu, K. Yvind and L.K. Oxenl⊘we, "Ultra-broadband optical signal processing using AlGaAs-OI devices," in Proc. 2017 Optical Fiber Communications Conference and Exhibition (OFC), Los Angeles, CA, 2017, pp. 1-3. Crossref
G. P. Agrawal, "Optical signal processing," in Fiber-Optic Communication Systems, 4th ed., New York, USA: John Wiley & Sons, Inc., 2012.
Metrics powered by PLOS ALM
- There are currently no refbacks.
Copyright (c) 2017 Jurnal Elektronika dan Telekomunikasi
This work is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International License.